Expert Details
Thin Films, PVD, Magnetron Sputtering, Reactive Sputtering
ID: 737220
California, USA
He worked as a PVD Process Development Manager at Sputtered Films Inc., Tegal Corporation, and OEM Group LLC. In the last several years, his research projects focused mostly on sputter deposition of piezoelectric films for electroacoustic devices, including Sc-doped and ultrathin AlN films, acoustic Bragg reflectors, control of film crystallinity and surface morphology, deposition on vertical sidewalls, reducing through-thickness stress gradient, and stress range across wafer.
He published more than 80 papers and conference presentations in thin-film technologies and holds 17 patents.
Education
Year | Degree | Subject | Institution |
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Year: 1989 | Degree: Ph.D. | Subject: Materials Science | Institution: Institute of High Current Electronics (Tomsk, Russia) |
Year: 1977 | Degree: M.S. | Subject: Electrical Engineering | Institution: Ryazan State Radio-Engineering University (Ryazan, Russia) |
Work History
Years | Employer | Title | Department |
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Years: 2010 to 2019 | Employer: OEM Group, LLC | Title: PVD Process Development Manager | Department: PVD Technology |
Responsibilities:Directed strategic PVD technology development while overseeing demo lab operation, testing, and personnel. This included leading process engineering teams, organizing demo wafer processing for potential customers, compiling research data, and leading research and development project operations. Implemented new deposition processes in mass production while delivering customer focused engineering. Resolved film quality and technology issues. |
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Years | Employer | Title | Department |
Years: 2002 to 2010 | Employer: Tegal Corporation | Title: PVD Process Development Manager | Department: PVD Technology |
Responsibilities:Was responsible for strategic PVD technology development projects and supervised all demo lab activities. |
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Years | Employer | Title | Department |
Years: 1997 to 2002 | Employer: Sputtered Films, Inc. | Title: PVD Process Development Manager, Sr. Scientist, Process Development Engineer | Department: PVD Technology |
Responsibilities:Responsible for thin film sputter processes development and technology demonstrations to potential customers. |
Career Accomplishments
Publications and Patents Summary |
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He published more than 80 papers and conference presentations in thin-film technologies and holds 17 patents. |