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Microelectromechanical Systems (MEMS), Microfabrication
MICROELECTROMECHANICS; MICROMACHINES; MICROELECTROMECHANICAL SYSTEMS. Expert has microelectromechanical systems (MEMS) as his primary research area. He is primarily concerned with the development of micromachines and related technologies for electronic, biomedical, and industrial applications. MICROFABRICATION; MICROMACHINING; SILICON MICROMACHINING. Expert has had over…