Expert Details
Microelectromechanical Systems (MEMS), Microfabrication
ID: 108243
Virginia, USA
MICROFABRICATION; MICROMACHINING; SILICON MICROMACHINING. Expert has had over 17 years of experience in microfabrication. This includes multiproject integrated circuit manufacture, process integration, and silicon micromachining. He is currently involved with new process technology development for microelectromechanical systems. These include thin film piezoelectric actuators and fabrication of high aspect ratio microstructures.
MEMS FABRICATION. Expert is the developer of several innovative technologies for the fabrication and application of microelectromechanical systems. These systems include micromechanical fastening systems ("micro-velcro") for joining biologic tissues; devices to inject DNA into cells; sputter deposition of piezoelectric thin films; high-aspect-ratio microstructures using anodic metal oxides; integrated MEMS using foundry supplied CMOS chips and post-processing; control of liquid bridging induced stiction using geometric tabs in released structures.
Education
Year | Degree | Subject | Institution |
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Year: 1987 | Degree: PhD | Subject: Electrical Engineering | Institution: Stanford University |
Year: 1980 | Degree: MEng | Subject: Electrical Engineering | Institution: Rensselaer Polytechnic Institute |
Year: 1979 | Degree: BS | Subject: Electrical Engineering | Institution: Rensselaer Polytechnic Institute |
Work History
Years | Employer | Title | Department |
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Years: 1997 to Present | Employer: Undisclosed | Title: Professor of Electrical Engineering and Biomedical Engineering | Department: |
Responsibilities:Available upon request. |
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Years | Employer | Title | Department |
Years: 1993 to 1997 | Employer: Carnegie Mellon University | Title: Associate Professor | Department: |
Responsibilities:Available upon request. |
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Years | Employer | Title | Department |
Years: 1996 to 1996 | Employer: Swiss Federal Institute of Technology, Zurich | Title: Visiting Professor | Department: |
Responsibilities:Available upon request. |
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Years | Employer | Title | Department |
Years: 1994 to 1994 | Employer: University of Twente, The Netherlands | Title: Visiting Researcher | Department: |
Responsibilities:Available upon request. |
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Years | Employer | Title | Department |
Years: 1987 to 1993 | Employer: Carnegie Mellon University | Title: Assistant Professor | Department: |
Responsibilities:Available upon request. |
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Years | Employer | Title | Department |
Years: 1983 to 1987 | Employer: Stanford University | Title: Research Assistant | Department: |
Responsibilities:Available upon request. |
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Years | Employer | Title | Department |
Years: 1980 to 1983 | Employer: Hewlett-Packard Laboratories | Title: Technical Staff | Department: |
Responsibilities:Available upon request. |
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Years | Employer | Title | Department |
Years: 1981 to 1983 | Employer: Mission College | Title: Instructor | Department: |
Responsibilities:Available upon request. |
International Experience
Years | Country / Region | Summary |
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Years: 2000 to 2000 | Country / Region: Germany | Summary: Visiting Professor, Institute for Microsystem Technology, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany |
Years: 1996 to 1996 | Country / Region: Switzerland | Summary: Visiting Professor, Physical Electronics Laboratory, ETH Zürich, Zürich, Switzerland |
Years: 1994 to 1994 | Country / Region: Netherlands | Summary: Visiting Researcher, MESA Research Institute, University of Twente, Enschede, The Netherlands |
Career Accomplishments
Associations / Societies |
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Expert is a member of the American Physical Society, a Senior Member of the IEEE, and a Fellow of the Institute of Physics. |
Professional Appointments |
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He was the General Co-Chairman of the 1996 IEEE MEMS Workshop, and is Associate Editor of the journal Sensors and Materials. |
Awards / Recognition |
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He has received many awards, including the Hertz Foundation Doctoral Thesis Prize (1988) and Presidential Young Investigator (1989). |
Publications and Patents Summary |
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He is the author of more than 50 scientific articles and books. He has seven issued patents and one textbook on circuit analysis. |
Fields of Expertise
microelectromechanics, micromachine, micromachining, microfabrication, micro electrical-mechanical system, bulk silicon micromachining, integrated-circuit manufacturing, microelectronics science, semiconductor wafer processing, silicon micromachining, silicon processing, silicon bonding, piezoelectric film, micromechanical system, technology development, electrical-mechanical system, electrooptic device, microelectronics research and development, thin-film technology, semiconductor material processing, semiconductor wafer cleaning, semiconductor device manufacturing, microelectronics thin-film application, solid-state electronics science, solid-state device, semiconductor ion implantation, semiconductor thermal oxidation, silicon, microstructure, microlithography, integrated circuit