Expert Details
Plasma Processing
ID: 729697
California, USA
Expert has consulted with dozens of companies dealing with problems and/or new approaches in microfabrication technologies. Most of these consulting jobs have been on-site with the company and have been short term (1-4 visits). A few have required many visits over a period of a year or so. Most of these consultations have involved proprietary issues.
Education
| Year | Degree | Subject | Institution |
|---|---|---|---|
| Year: 1967 | Degree: PhD | Subject: Electrical Engineering | Institution: University of Minnesota |
| Year: 1958 | Degree: MASc. | Subject: Physics | Institution: University of British Columbia |
| Year: 1956 | Degree: BASc | Subject: Engineering Physics | Institution: University of British Columbia |
Work History
| Years | Employer | Title | Department |
|---|---|---|---|
| Years: 1968 to 1993 | Employer: IBM | Title: Research Staff Member and Manager | Department: Research Division |
Responsibilities:Supervise a group of research scientists and technicians and individually carry out research in plasma science. |
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International Experience
| Years | Country / Region | Summary |
|---|---|---|
| Years: 1993 to 1994 | Country / Region: Germany | Summary: Alexander von Humboldt Senior Scientist Award to the Fraunhofer Institute for Applied Solid State Physics in Freiburg, Germany. |
| Years: to Present | Country / Region: Many | Summary: Technical training course presented in many countries (Canada, Mexico, Brazil, Germany, France, China, Czech Republic, Switzerland, UK, Israel, Korea, Malasia, Singapore) |
Career Accomplishments
| Associations / Societies |
|---|
| American Vacuum Society |
| Professional Appointments |
|---|
| American Vacuum Society (AVS) President 1988; AVS Treasurer 1999-2006. |
| Awards / Recognition |
|---|
| Nishizawa Award from Dry Processing Symposium in Japan (2010); AVS Expert Thornton Memorial Award (1993); Alexander von Humboldt Senior Scientist Award (1993-4); AVS Honorary Member (1991); Tegal "Thinker" Award (1983). |
| Publications and Patents Summary |
|---|
| Has about 110 papers published in refereed journals. |
Additional Experience
| Expert Witness Experience |
|---|
| Expert witness in several ITC and other courts - a few court appearances and some depositions expert reports, etc. |
| Training / Seminars |
|---|
| Developed and presented a two-day technical training course entitled "Plasma Etching and Reactive Ion Etching." Expert has presented this course ver 300 times to thousands of attendees, nationally and internationally. |
Fields of Expertise
gas plasma, material processing, microfabrication microwave processing, microwave plasma processing, plasma chemical process, plasma chemistry, plasma cleaning, plasma processing, plasma surface treatment, plasma-aided manufacturing, semiconductor material processing, silicon processing, surface treatment, thin-film processing, fluoropolymer processing, plasma damage, plastic material plasma processing, industrial nonfood microwave processing, electronic material processing, thin-film deposition, plasma polymerization, polymer film production, plasma physics, plasma-enhanced chemical vapor deposition