Expert Details
Physics: Charged Particle & Focused Ion Beam (FIB); Scanning Electron Microscopy; Nanotechnology & Microscopy Instrumentation; Semiconductor Metrology & Circuit Edit Systems
ID: 740574
Massachusetts, USA
Expert's career has centered on the development and commercialization of advanced microscopy and ion beam instrumentation for the semiconductor and materials science industries. Expert played a foundational role in developing the first viable helium ion source and prototype helium ion microscope achieving sub-nanometer resolution at an instrumentation startup company later acquired by a major optics and instrumentation manufacturer. Expert subsequently led research and development for that manufacturer's microscopy division, managing the commercialization of the first-generation helium ion microscope and a large government-funded semiconductor debug circuit analysis program, and later served in senior scientist and special projects leadership roles supporting next-generation semiconductor circuit edit instrumentation and business development. Earlier in Expert's career, Expert held program and systems engineering management roles at other instrumentation companies, contributing to the development of FIB/SEM metrology products, automated microscopy algorithms, and electron beam detection systems, and served on an academic faculty as a Professor of Physics.
Expert holds 50 patents and has authored more than 60 peer-reviewed journal articles, 5 book chapters, and delivered 50 public presentations across a career spanning charged particle physics, electron/ion optics, and nanoscale instrumentation. Expert is an active member of several major physics, microscopy, and vacuum science professional societies.
Education
| Year | Degree | Subject | Institution |
|---|---|---|---|
| Year: 1993 | Degree: Ph.D. | Subject: Physics | Institution: University of California, Berkeley |
Work History
| Years | Employer | Title | Department |
|---|---|---|---|
| Years: 2020 to 2024 | Employer: Carl Zeiss | Title: Staff Scientist, Special Projects | Department: PCS Division |
Responsibilities:• Developed a next-generation FIB-based semiconductor circuit edit instrument featuring advances in system reliability, beam placement, and beam chemistry capabilities.• Established requirements for new facilities and coordinated with external partners (architecture firm, general contractors, state offices); oversaw relocation to a modernized, energy-efficient facility. |
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| Years | Employer | Title | Department |
| Years: 2017 to 2020 | Employer: Carl Zeiss | Title: Chief Scientist for Business Development | Department: |
Responsibilities:• Promoted commercial success of instrument product lines through sales personnel training, user meetings, publication analysis, and funding opportunity support.• Provided R&D with prioritized development activities and business opportunity forecasting; contributed to the sale of 84 "NanoFab" instruments at a typical unit price of $1.8 million. |
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| Years | Employer | Title | Department |
| Years: 2007 to 2017 | Employer: Carl Zeiss | Title: Director of Research and Development | Department: Microscopy Division |
Responsibilities:• Managed a team of scientists and technicians in developing and commercializing the first-generation helium ion microscope (HIM), ultimately selling 31 instruments at a typical unit price of $1.2 million.• Managed a $24 million, 4-year IARPA-funded program to develop a semiconductor debug circuit analysis platform, laying the foundation for a commercial instrument and securing associated intellectual property. • Led development of a commercial microscopy/sample-modification platform utilizing helium/neon focused ion beams, including cryogenic, SIMS, and third-party accessory capabilities. |
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| Years | Employer | Title | Department |
| Years: 2005 to 2007 | Employer: ALIS Corporation | Title: Ion Source Scientist | Department: |
Responsibilities:• Developed the first viable helium ion source with unprecedented brightness; responsible for reliability and stability improvements.• Developed prototype and beta versions of a helium ion microscope achieving 0.25 nm resolution, including complex system integration for ultra-high vacuum, high voltage, cryogenics, and low-vibration environments. • Worked with patent counsel to file a foundational family of patents across multiple jurisdictions. |
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| Years | Employer | Title | Department |
| Years: 2002 to 2005 | Employer: FEI Company | Title: Program Manager, Science Group Manager for North America | Department: Fab Products Division |
Responsibilities:• Led successful introduction of new FIB/SEM metrology products (approximately $3M) into semiconductor and data storage fabrication facilities for quality control and sub-surface 3D metrology/defect analysis.• Served on the Intellectual Property Review Board, participating in analysis and decisions regarding protection of key technologies. • Served as principal architect of algorithms for automated SEM column alignment, auto-focus, auto-gain control, and auto-histogram manipulation. |
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Additional Experience
| Expert Witness Experience |
|---|
| Involved in cases of patent litigation, and corporate espionage. |
Career Accomplishments
| Associations / Societies |
|---|
| • American Physical Society (APS) • American Vacuum Society (AVS) • Institute for electrical and electronics engineers (IEEE) • Microscopy Society of America (MSA) • Materials Research Society (MRS) |
| Publications and Patents Summary |
|---|
| • 50 patents, spanning electron beam technology, ion source design, and related charged particle instrumentation • 60+ peer-reviewed journal articles, including foundational doctoral research published in Physical Review Letters • 5 book chapters • 50 public presentations |
Fields of Expertise
physics, nanotechnology, business development, scanning electron microscope, mechanical system vibration, cryogenic heat transfer, Charged Particle Optics, Focused Ion Beam (FIB), Scanning Electron Microscopy (SEM), Helium Ion Microscopy, Semiconductor Metrology, Circuit Edit Systems, Ultra-High Vacuum Systems, Instrumentation Development, plasma physics, cryogenics, electron optics