Expert Details
Semiconductor Materials Characterization Thin Film Deposition
ID: 723141
New York, USA
He has over 25 years of experience with vacuum systems from basic rough pumped deposition chambers to ultrahigh vacuum all metal sealed systems reaching base vacuum pressures of 1x10-11 torr. In the course of his research he has acquired extensive expertise with many types of pumping systems including Oil & Mercury Diffusion, Turbo, Ion, Cryo, Sublimation, Roots Blowers, Rotary vane, Scroll, Diaphragm, and Venturi pumps. This also includes extensive work with various vacuum measurement techniques such as Ion, Cold cathode, Manometers, Strain, Pirani, and RGA. In the course of his research he has designed, built, and operated vacuum systems for eptitaxial and thin film deposition of state of the art opto-electornic materials and high temperature, high vacuum in-situ x-ray analysis. These systems required the use of many different high temperature materials (e.g. aluminum oxide, pyrolitic boron nitride, tantulum, molybdenum, and tungsten) compatible with a high temperature and high vacuum environment. He has worked with many different vacuum deposition techniques, which include thermal (both resistive and e-beam), sputtering, PECVD, MBE, and MOCVD. He has worked with numerous systems requiring the pumping of toxic and flammable gasses such as phosphine, arsine, silane, hydrogen, oxygen, and pyrophroric metalorganics and has acquired extensive experience with all of the associated safety issues in the use of these hazardous gasses including storage, monitoring, personal protective equipment such as SCBA's, emergency response procedures, and waste removal requirements and procedures.
He has many years of experience in the field of x-ray diffraction starting from his thesis work in dynamical x-ray diffraction in fulfillment of a Master Degree from the Polytechnic Institute of New York. He has experience with numerous diffraction techniques including powder, back reflection Laue, high resolution single crystal, double crystal, dynamical and energy dispersive techniques using both sealed tube and rotating anode x-ray sources. In the course of his research he has investigated many different materials including but not limited to various thin film metal contacts, silicides, oxides, superconductors, and III-V semiconductors. He has designed and built numerous custom x-ray systems for the study of both thin film and single crystal structures. The results of these studies have been published in peer-reviewed journals such as JAP and APL. He has developed various C based software applications utilizing Fourier analysis to simulate x-ray diffraction data and extract structural parameters.
He provides consulting services for the High Speed Electronics group at Bell Labs, Murray Hill, NJ. This includes consulting on new epitaxial growth techniques and materials for high speed InP based electronics. He also provides support for upgrading and maintaining their semiconductor growth system which includes the vacuum system, toxic gas handling, safety and control systems.
Education
Year | Degree | Subject | Institution |
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Year: 1979 | Degree: MS | Subject: Physics | Institution: Polytechnic Institure of New York |
Year: 1977 | Degree: BS | Subject: Physics | Institution: Polytechnic Institute of New York |
Work History
Years | Employer | Title | Department |
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Years: 2001 to Present | Employer: Undisclosed | Title: Member of Technical Sales | Department: Growth and Characterization |
Responsibilities:He manages a production MOCVD reactor for the development & production of optical devices (lasers and detectors) for telecom applications. This includes all aspects of system operation and coordination between various projects. He is responsible for the materials development and mask design for various foundry and government contracts. He also handles all purchasing for the Growth & Characterization grouup.He managed the design and construction of a new 10,000ft2 semiconductor clean room facility for III-V growth and processing, including all hazardous gas safety systems, chemical waste treatment systems, compliance with local and national fire and safety codes, and installation of all growth and characterization equiqment. Responsible for coordinating with general contractor from initial concept to commisioning/certification of clean room. |
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Years | Employer | Title | Department |
Years: 1982 to 2001 | Employer: Lucent Technologies/AT&T Bell Labs | Title: Member of Technical Staff | Department: Physical Sciences Research |
Responsibilities:He carried out research and development in advanced semiconductor opto-electronic devices and processing of semiconductor materials. He published many papers in peer reviewed journals and given presentations at numerious industry conferences.He was responsible for managing the epitaxial growth program for the development of high speed Indium Phosphide based materials/devices using the Molecular Beam Epitaxy growth method. Managed and coordinated development lab for thin film deposition of various metals, metal oxides, oxides, and carbon films using e-beam, sputter,and thermal deposition techniques. He has designed and built a variety of UHV compatible high temperature cells used in various film deposition applications. He developed a number of Fortran and C based software applications utilizing Fourier analysis to simulate x-ray diffraction data and extract structural parameters. |
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Years | Employer | Title | Department |
Years: 1978 to 1982 | Employer: AT&T Bell Labs | Title: Senior Technical Associate | Department: Physical Sciences Reasearch |
Responsibilities:He was responsible for the operation of a research and development thin film deposition lab. This included the designing, construction, and operation various thin film deposition systems including e-beam, thermal, and sputter systems. He has worked with the deposition of many different materials systems including Au-Al, Cu-Al, PbO, and type A15 superconductors. |
Government Experience
Years | Agency | Role | Description |
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Years: 2001 to Present | Agency: DARPA | Role: Team member | Description: New materials and device development for DARPA contract. |
Career Accomplishments
Associations / Societies |
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IEEE |
Publications and Patents Summary |
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He has more than 50 publications and 6 patents |
Fields of Expertise
epitaxial reactor, vacuum system, high vacuum system, ultra-high vacuum system, vacuum environment, X-ray diffraction analysis, atomic layer deposition, diffractometer, crystal lattice physics, crystal structure determination, chemical vapor deposition precursor material, diffraction pattern, high-vacuum technology, X-ray detection, semiconductor laser, thin-film technology, semiconductor material processing, electromagnetic radiation, X-ray absorption, X-ray diffraction, powder X-ray diffraction, solid-state physics, vacuum technology, high vacuum, crystalline structure